LED Light Source and Optical Systems

LED Light Source and Optical Systems for Lithography Equipment
Photo Litho G’s LED light source and optical systems for lithography equipment are core units used in lithography processes that require the production of fine patterns for LCDs, OLEDs, PCBs, and touch panels, among others. They comprise the main pieces of equipment used in the photo process of lithography.

Previously, lithography equipment used ultra-super-high pressure mercury short arc lamps. But they have been replaced with LED light sources, and an optical system for this has been applied.
The LED light source and optical systems for lithography equipment have resolved various issues associated with the previous ultra-high-pressure mercury lamp method, and offer many advantages to customers who adopt this technology.
First, the various cooling systems required due to heat generation in the existing ultra-high-pressure mercury lamp system have been eliminated, and various optical components required to concentrate and transmit light have also been eliminated. This has resulted in a simpler system.

Second, this has significantly reduced equipment manufacturing costs and maintenance costs.
Third, the service life has been improved by tens of times compared to conventional lamps, resulting in significant drops in production losses caused by equipment downtime during lamp replacement, and lamp replacement costs.
Fourth, the application of monochromatic light has improved resolution, one of the most critical performance factors for forming micro-patterns. Additionally, various issues caused by the absorption of light from multiple wavelength bands during lithography have been significantly improved.
Fifth, there is no ozone generation caused by 185nm UV light, making the process harmless to humans. Furthermore, there is no risk of explosion due to poor cooling of the existing lamp.
Photo Litho G Co., Ltd. has specialized in developing, supplying, and providing after-sales support for optical systems and LED light sources for lithography equipment. 
 
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