[INQ. NO. 2608M03] While semiconductors and displays use silicon and glass, respectively, as substrates, they share a common characteristic: they involve the repetition of complex etching and coating processes in a vacuum.
Consequently, robots deployed in these processes require high precision and fast operational performance.
T-ROBOTICS, a company specializing in robotics, exhibited a dual parallel-link robot arm reflecting market demands at K-Display 2026.
This product, which also won the nation’s Minister’s Award at the K-Display Awards held in conjunction with the exhibition, fundamentally eliminates arm sagging and vibration. This enables precise and rapid transportation of objects weighing up to 240 kg even in high-temperature environments of up to 500°C and high vacuum conditions.
In particular, it was designed with a minimized turning radius to reduce the space required for installation at manufacturing sites, and it incorporates sealing technology to maintain the vacuum environment ‒ as well as outgassing suppression technology to prevent the release of minute gases.

A spokesperson for the company explained, “Inside the chambers where display processing takes place, there are environmental factors that are difficult to manage, including toxic gases. Our technology’s outstanding feature is that it rapidly moves substrates through very narrow doorways using only the robot’s fingers.”
According to the company, by applying dual parallel link technology, fluctuations can be reduced by half even when the same force is applied. The length of the robot arm can be adjusted from 3 to 7 meters, depending on the size of the robot.
T-ROBOTICS was originally a company that developed vacuum robots for semiconductors, and it began manufacturing display robots in 2007 as well, currently holding 10 domestic and 33 international patents.
Currently, there are three companies worldwide that produce display-related robots, including T-ROBOTICS, a company that remains strong in the fields of Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD). T-ROBOTICS plans to continue targeting areas where other companies are strong in the future.
 
 
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