Ashing system

https://korean-machinery.com///inquiry[INQ. NO. 1701M07] PSK’s flagship product, Supra V, is the latest generation of ashing system. With increased productivity, it is designed with the smallest footprint for 300mm ashing systems. The system provides improved throughput, consistency, and increased precision compared to previous models. The newly revised ferrite coupled induction plasma (FCIP) source offers enhanced processing capacity compared to microwave plasma, in which plasma damage has been significantly minimized.
A multi-source platform is designed for installing FCIP or point inductively coupled plasma (PCIP) depending on the user’s application purpose. PCIP can be used for both front-end and back-end applications. In addition to Supra V’s innovative process advancements, major improvements in the reliability of the system have been achieved through easier maintenance and field-proven customizable software.
In today’s ever changing environments, PSK will quickly adapt to changes and lead the industry by creating value toward a more sustainable and systematic growth. Furthermore, the company will continue to intensively invest in R&D in order to improve technological processes and deliver quality products.
201701m_page_23_03In the past, the company has focused on asher processing and semiconductor equipment manufacturing. However, the vision and goal of PSK is to ultimately become the global leader in the overall device processing sector across all semiconductor processes by 2021. Currently, the company is focusing on the development of innovative technologies to lead the inevitable paradigm shift of the semiconductor industry. With an aggressive R&D investment strategy, PSK will continue to achieve breakthrough innovations in technology and develop new cutting-edge equipment.

korean-machinery.com | Blog Magazine of korean-machinery, brands and Goods

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